DUV or EUV, that is the question

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4146, Issue , 2000, Pages 1-12

  Williamson, David M ^a  

^a Silicon Valley Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AERIAL IMAGES; NUMERICAL APERTURES (NA); PROJECTION OPTICS; RAYLEIGH'S CONSTANTS;

FOCUSING; LIGHT SOURCES; OPTICAL PROJECTORS; OPTICAL RESOLVING POWER; PHOTORESISTORS; REFRACTION; ULTRAVIOLET RADIATION;

PHOTOLITHOGRAPHY;

EID: 0034498686     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.406659     Document Type: Conference Paper

References (24)