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Applied Physics A: Materials Science and Processing

Volumn 72, Issue 1, 2001, Pages 121-124

Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

(7) Lim, Y C a Westerwalbesloh, T a Aschentrup, A a Wehmeyer, O a Haindl, G a Kleineberg, U a Heinzmann, U a

a BIELEFELD UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000602536 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390000723 Document Type: Article

Times cited : (66)

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