Nano-carbon nitride synthesis from a bio-molecular target for ion beam sputtering at low temperature

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 605-609

  Wu, J J ^a   Lu, T R ^b   Wu, C T ^c   Wang, T Y ^c   Chen, L C ^c   Chen, K H ^a   Kuo, C T ^b   Chen, T M ^b   Yu, Y C ^d   Wang, C W ^d   Lin, E K ^d  

^a INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Bio material; C3N4; Sputtering

Indexed keywords

BIOMATERIALS; CHEMICAL BONDS; CRYSTAL ATOMIC STRUCTURE; FILM GROWTH; INFRARED SPECTROSCOPY; ION BEAMS; MOLECULAR STRUCTURE; NANOSTRUCTURED MATERIALS; SPUTTERING; SYNTHESIS (CHEMICAL); X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; ION BEAM SPUTTERING;

NITRIDES;

EID: 0032615479     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00283-0     Document Type: Article

References (19)

1. Liu A.Y., Cohen M.L. Science. 245:1989;841.
2. Sung C.M., Sung M. Mater. Chem. Phys. 43:1996;1.
3. Teter D.M., Hemely R.J. Science. 271:1996;53.
4. Wixom M.R. J. Am. Ceram. Soc. 73:1990;1973.
5. Niu C., Lu Y.Z., Lieber C.M. Science. 261:1993;53.
6. Li D., Lopez S., Chung Y.M., Wong M.S., Sproul W.D. J. Vac. Sci. Technol. A. 13:1995;1063.
7. Yu K.M., Cohen M.L., Haller E.E., Hansen W.L., Liu A.Y., Wu I.C. Phys. Rev. B. 49:1994;5034.
8. Boyed K.J., Marton D., Todorov S.S., AI-bayati A.H., Kulik J., Zuhr R.A., Rabalais J.W. J. Vac. Sci. Technol. A. 13:1995;2110.
9. Diani M., Mansour A., Kubler L., Bischoff J.L., Bolmont D. Diamond Relat. Mater. 3:1994;264.
10. Chen Y., Guo L., Chen F., Wang E.G. J. Phys. Cond. Matt. 8:1996;L685.
11. Yen T.Y., Chou C.P. Appl. Phys. Lett. 67:1995;6.
12. Chen L.C., Lu T.R., Kuo C.T., Bhusari D.M., Wu J.J., Chen K.H., Chen T.M. Appl. Phys. Lett. 72:1998;3449.
13. T.R. Lu, L.C. Chen, K.H. Chen, D.M. Bhusari, T.M. Chen, C.T. Kuo, Thin Solid Films, in press.
14. T.R. Lu, C.T. Kuo, J.R. Yang, L.C. Chen, K.H. Chen, T.M. Chen, Surf. Coat. Technol., in press.
15. Feng Y., Zhou Z., Zhou Y., Zhao G. Nucl. Instrum. Meth. B. 86:1994;225.
16. Feng Y., Zhou Z., Zhao G., Yang F. Nucl. Instrum. Meth. B. 94:1994;11.
17. Viera G., Andujar J.L., Sharma S.N., Bertran E. Diamond Relat. Mater. 7:1998;407.
18. Marton D., Boyd K.J., Al-Bayati A.H., Todorov S.S., Rabalais J.W. Phys. Rev. Lett. 73:1994;118.
19. Hammer P., Gissler W. Diamond Relat. Mater. 5:1996;1152.