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Journal of Applied Physics

Volumn 89, Issue 10, 2001, Pages 5552-5558

Electrical and structural characterization of metal-oxide-semiconductor capacitors with silicon rich oxide

(9) Crupi, I a Lombardo, S a Spinella, C a Bongiorno, C a Liao, Y a Gerardi, C b Fazio, B b Vulpio, M b Privitera, S c

a CNR IMETEM (Italy)

b STMICROELECTRONICS (Italy)

c UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035873282 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1359751 Document Type: Article

Times cited : (22)

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