SCOPUS 정보 검색 플랫폼

Materials Science and Engineering R: Reports

Volumn 17, Issue 8, 1996, Pages 281-336

Electrical and optical properties of semi-insulating polycrystalline silicon thin films: The role of microstructure and doping

(2) Lombardo, Salvatore a Campisano, Salvatore Ugo a,b

a CNR (Italy)

b INFM (Italy)

Author keywords

Doping; Electrical properties; Microstructure; Optical properties; Polycrystalline silicon

Indexed keywords

CRYSTAL MICROSTRUCTURE; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTROLUMINESCENCE; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; SILICA; SILICON;

POLYCRYSTALLINE SILICON; SEMI-INSULATING SILICON;

THIN FILMS;

EID: 0041590854 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(96)00193-3 Document Type: Article

Times cited : (28)

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