SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 18, 2001, Pages 3969-3976

Extreme-ultraviolet multilayer mirrors deposited using radio-frequency-magnetron sputtering: The influence of self-bias voltage on reflectivity and roughness

(2) Putero Vuaroqueaux, M a Vidal, B a

a AIX MARSEILLE UNIVERSITÉ (France)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MAGNETRON SPUTTERING; OPTICAL MULTILAYERS; REFLECTION; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET LITHOGRAPHY; EXTREME ULTRAVIOLET MULTILAYER MIRRORS; RADIO FREQUENCY MAGNETRON SPUTTERING; SELF BIAS VOLTAGE;

MIRRORS;

EID: 0035821029 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/13/18/307 Document Type: Article

Times cited : (10)

References (21)

1
- 0032652144
- (1999) IEEE J. Quantum Electron. , vol.35 , pp. 694
- Stulen, R.H.¹ Sweeney, D.W.²

2
- 0002306133
- (1998) Solid State Technol. , vol.41 , pp. 78
- Derbyshire, K.¹

3
- 0040489504
- (1998) Intel Technol. J. Q , vol.3 , pp. 1
- Bjorkholm, J.E.¹

4
- 0000130079
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3142
- Gwyn, C.W.¹ Stulen, R.H.² Sweeney, D.W.³ Attwood, D.⁴

5
- 0032402999
- (1998) Proc. SPIE , vol.3331 , pp. 580
- Taylor, J.S.¹ Sommargren, G.E.² Sweeney, D.W.³ Hudyma, R.M.⁴

6
- 84953675274
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2662
- Stearns, D.G.¹ Rosen, R.S.² Vernon, P.³

7
- 0032186871
- (1998) Physica B , vol.253 , pp. 28
- Jergel, M.¹ Holy, V.² Majkova, E.³ Luby, S.⁴ Senderak, R.⁵ Stock, H.J.⁶ Menke, D.⁷ Kleineberg, U.⁸ Heinzmann, U.⁹

8
- 0032665978
- (1999) Opt. Eng. , vol.38 , pp. 1246
- Mirkarimi, P.B.¹

9
- 0001662271
- (2000) Appl. Opt. , vol.39 , pp. 1617
- Mirkarimi, P.B.¹ Bajt, S.² Wall, M.A.³

10
- 0032630541
- (1999) Proc. SPIE , vol.3676 , pp. 710
- Montcalm, C.¹ Spiller, E.² Wedowski, M.³ Gullikson, E.M.⁴ Folta, J.A.⁵

11
- 0028493189
- (1994) J. Appl. Phys. , vol.76 , pp. 2144
- Slaughter, J.M.¹

12
- 0004967642
- Investigation on multilayer coatings for EUV spectral region
- Fraunhofer Institut fur Angewandte Optik und Feinmechanik (Jena) Annual Report 1998
- Feigl, T.¹ Pommiès, M.² Kaiser, N.³

13
- 56249127529
- (1998) J. Appl. Phys. , vol.84 , pp. 1003
- Stearns, D.G.¹ Gaines, D.P.² Sweeney, D.W.³

14
- 0001488529
- (1991) Opt. Eng. , vol.30 , pp. 636
- Vidal, B.¹ Marfaing, J.²

15
- 0031704196
- (1998) Thin Solid Films , vol.312 , pp. 320
- Cilia, M.¹ Yakschin, A.² Trambly, H.³ Vidal, B.⁴ Bretagne, J.⁵

16
- 26144449160
- (1954) Phys. Rev. , vol.95 , pp. 359
- Parrat, L.G.¹

17
- 0004923816
- PhD Thesis Université de Paris-Sud, Orsay
- (1978)
- Névot, L.¹

18
- 0019569144
- (1981) Opt. Commun. , vol.37 , pp. 159
- Lee, P.¹

19
- 0021444811
- (1984) Appl. Opt. , vol.23 , pp. 1794
- Vidal, B.¹ Vincent, P.²

20
- 0004923292
- (2000) J. Appl. Phys. , vol.87 , pp. 7647
- Shadid, R.¹

21
- 0004940099
- Comparison of interfacial roughness propagation and correlation in Mo/Si multilayers deposited using ion beam sputtering and RF-magnetron sputtering
- in preparation
- (2001)
- Putero-Vuaroqueaux, M.¹ Vidal, B.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.