Multilayer coatings of 10× projection optics for extreme-ultraviolet lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue II, 1999, Pages 710-716

  Montcalm, Claude ^a   Spiller, Eberhard ^a   Wedowski, Marco ^a   Gullikson, Eric M ^a   Folta, James A ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; DEPOSITION; MULTILAYERS; REFLECTIVE COATINGS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; WAVELENGTH MISMATCH;

PHOTOLITHOGRAPHY;

EID: 0032630541     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)