SCOPUS 정보 검색 플랫폼

Volumn 312, Issue 1-2, 1998, Pages 320-326

Optical emission spectroscopy study of a radio-frequency magnetron discharge used for the fabrication of X-ray multilayer mirror

Author keywords

Magnetron; Optical emission; Sputtering; X ray

Indexed keywords

ARGON; EMISSION SPECTROSCOPY; LIGHT EMISSION; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; PRESSURE EFFECTS; TUNGSTEN; X RAY APPARATUS;

RADIO FREQUENCY MAGNETRON DISCHARGES;

OPTICAL FILMS;

EID: 0031704196 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00417-3 Document Type: Article

Times cited : (11)

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