Simple wet etching of GaN

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 104-110

  Parish, G ^a   Scali, P A ^a   Spaargaren, S M R ^a   Nener, B D ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Gallium nitride; GaN; PEC; Processing; Surface; UV; Wet etch

Indexed keywords

ETCHING; LIGHTING; OXIDATION; PH EFFECTS; SOLUTIONS;

WET ETCHING;

GALLIUM NITRIDE;

EID: 0035772538     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448955     Document Type: Conference Paper

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