Laser micromachining for manufacturing MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 53-59

  Gower, Malcolm ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

Biofactory on a chip; Laser micromachining; MEMS; Microoptics; MOEMS

Indexed keywords

CRYSTALLOGRAPHY; LASER APPLICATIONS; LITHOGRAPHY; MICROMACHINING; MICROOPTICS; MICROPROCESSOR CHIPS;

LASER MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035768033     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443040     Document Type: Conference Paper

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