Industrial applications of pulsed lasers to materials microprocessing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 171-182

  Gower, Malcolm C ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

Industrial applications; Laser ablation; Materials microprocessing; Pulsed lasers

Indexed keywords

AMORPHOUS SILICON; FIBER BRAGG GRATINGS; FLAT PANEL DISPLAYS; INDUSTRIAL APPLICATIONS; LASER ABLATION; MICROELECTROMECHANICAL DEVICES; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SOLAR ENERGY; SOLAR SYSTEM;

DEEP-UV; HARD DISKS; INK-JET PRINTERS; MANUFACTURING INDUSTRIES; MICRO DRILLINGS; MICRO-ELECTRO MECHANICAL SYSTEMS; PULSED LASERS; SOLAR PANELS; VIA HOLES;

LASERS;

EID: 2942529034     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321564     Document Type: Conference Paper

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