Excimer laser micromachining and replication of 3D optical surfaces

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 911-914

  Braun, A ^a   Zimmer, K ^a   Hosselbarth B ^a   Meinhardt, J ^a   Bigl, F ^a   Mehnert, R ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

3D structuring; Ablation; Excimer laser; Polymer; Replication

Indexed keywords

COST EFFECTIVENESS; EXCIMER LASERS; LASER ABLATION; MICROMACHINING; MICROSTRUCTURE; POLYMERS; SURFACE STRUCTURE;

INVERSE REPLICATION; LASER MICROMACHINING; MICROPRISMS;

OPTICAL MATERIALS;

EID: 0032072073     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00765-4     Document Type: Article

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