Polymer microsystems by excimer laser ablation: From rapid prototyping to large number fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 307-315

  Klotzbücher, Thomas ^a   Braune, Torsten ^a   Sigloch, Susanne ^a   Hoßfeld, Jens ^a   Neumeier, Michel ^a   Bauer, Hans Dieter ^a   Ehrfeld, Wolfgang ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Excimer laser ablation; Laser LIGA; Microtechnology; Polymers; Rapid prototyping

Indexed keywords

ABLATION; COST EFFECTIVENESS; EXCIMER LASERS; FABRICATION; FLUORINE COMPOUNDS; INJECTION MOLDING; LASER APPLICATIONS; MICROELECTRONICS; POLYMERS; RAPID PROTOTYPING; X RAY LITHOGRAPHY;

ARF EXCIMER LASER; COST-EFFECTIVE FABRICATION; DEEP X-RAY LITHOGRAPHY; MASK PROJECTION TECHNIQUES; MICROTECHNOLOGY; POLYMER MICROSTRUCTURES; POLYMER MICROSYSTEMS; STRUCTURAL DIVERSITY;

LASER ABLATION;

EID: 0000658797     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432523     Document Type: Conference Paper

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