The formation of moulds for 3D microstructures using excimer laser ablation

Microsystem Technologies

Volumn 3, Issue 1, 1996, Pages 17-19

  Lawes, R A ^a   Holmes, A S ^b   Goodall, F N ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002675013     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050048     Document Type: Article

References (13)

1. Arnold J; Dasbach U; Ehrfeld W; Hesch K; Löwe H (1995) Combination of excimer laser micromachining and replication processes suited for large scale production ('Laser-LIGA'). Applied Surface Science, Vol 86: 251-258
2. Davis GM; Gibson AF; Gower MC; Lawes RA; Moody RA (1983) Direct photoetching of resist materials using excimer lasers. Microcircuit Engineering '83: 191-198
3. Engelmann G; Ehrmann O; Simon J; Reichl H (1993) Fabrication of high depth-to-width aspect ratio microstructures. Proc MEMS '92: 92-98
4. Frazier AB; Allen MG (1994) Metallic microstructures fabricated using photosensitive polyimide electroplating moulds. J Microelectromechanical Systems, Vol 2, No 2: 87-94
5. Goodall FN; Lawes RA; Arthur GG (1990) Deep uv optics for excimer laser systems. Microcircuit Engineering '89: 187-195
6. Holmes AS; Mathieson D (1995) Developments in microengineering for the production of 3D micromachines. Proc 8th IPES: 439-442
7. Juan WH; Pang SW (1994) High aspect ratio polyimide etching using an oxygen plasma generated by electron cyclotron resonance source. J Vac Sci Technol B, Vol 12, No 1: 422-426
8. Lawes RA (1993) Laser and electron beam-based LIGA processes. Institution of Electrical Engineers, Digest No 1993/182
9. Löchel B; Maciossek A; König M; Quenzer HJ; Huber HL (1993) Galvanoplated 3D structures for microsystems. Microcircuit Engineering 1993
10. Lorenz H; Paratte L; Luthier R; de Rooij NF; Renaud P (1995) Low cost technology for multilayer electroplated parts using laminated dry film resist. Proc Transducers '95 and Eurosensors IX: 569-572
11. Shimokawa F; Furuya A; Matsui S (1991) Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system. Proc MEMS '91: 192-197
12. Wagner B; Quenzer HJ; Henke W; Hoppe W; Pilz W (1994) Microfabrication of complex surface topographies using graytone-lithography. Eurosensors '94. To be published in Sensors and Actuators
13. Zhu J; Hohnes AS; Arnold J; Lawes RA; Prewett PD (1996) Laminated dry film resist for micro engineering applications. Microelectronic Engineering 30 (1996): 365-368