Quality study on the excimer laser micromachining of electro-thermal-compliant micro devices

Journal of Micromechanics and Microengineering

Volumn 11, Issue 1, 2001, Pages 38-47

  Li, Jun ^a   Ananthasuresh, G K ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; EXCIMER LASERS; HEAT AFFECTED ZONE; INDICATORS (CHEMICAL); LASER PULSES; MICROACTUATORS; OPTIMIZATION; SILICON; SURFACE ROUGHNESS;

CONTROL PARAMETERS; ELECTRO-THERMAL-COMPLIANT MICRO DEVICES;

MICROMACHINING;

EID: 0035128042     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/1/307     Document Type: Article

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