Production of novel 3D microstructures using excimer laser mask projection techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 546-552

  Rizvi, Nadeem H ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER APPLICATIONS; MASKS; MICROMACHINING; MICROSTRUCTURE;

MASK PROJECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032663417     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341245     Document Type: Conference Paper

References (0)