Numerical study of the effects of frequency in inductively coupled plasma using particle-in-cell/Monte Carlo simulation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 3 A, 2000, Pages 1358-1364

  Oh, Jin Sung ^a   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Electron energy distribution; ICP; Induction frequency; PIC MCS; Temporal mean energy characteristics

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC INDUCTORS; ELECTRON ENERGY LEVELS; MONTE CARLO METHODS; NATURAL FREQUENCIES; PLASMA COLLISION PROCESSES; PLASMA DENSITY;

INDUCTION FREQUENCY; INDUCTIVELY COUPLED PLASMA; PARTICLE IN CELL; TEMPORAL MEAN ENERGY CHARACTERISTICS;

PLASMAS;

EID: 0033734140     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.1358     Document Type: Article

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