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Volumn 40, Issue 11 A, 2001, Pages
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Optical emission spectroscopy of pulsed inductively coupled plasma in Ar
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Author keywords
Emission selected CT image; Plasma structure; Pulsed ICP in Ar; Radon Abel inversion; Time resolved spectroscopy
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Indexed keywords
ARGON;
COMPUTERIZED TOMOGRAPHY;
ELECTRONIC DENSITY OF STATES;
EMISSION SPECTROSCOPY;
HIGH PRESSURE EFFECTS;
LIGHT EMISSION;
PLASMA DENSITY;
RELAXATION PROCESSES;
EXCITED STATE DENSITIES;
METASTABLE DENSITY;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA STRUCTURE;
PULSED INDUCTIVELY COUPLED PLASMA;
TIME RESOLVED SPECTROSCOPY;
INDUCTIVELY COUPLED PLASMA;
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EID: 0035517799
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.l1183 Document Type: Letter |
Times cited : (11)
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References (27)
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