Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 50-51

  Hirata, Hajime ^a   Tadokoro, Masahiro ^a   Nakano, Nobuhiko ^a   Petrović, Zoran Lj ^a,b   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ARGON; ATOMS; CARRIER CONCENTRATION; COMPUTERIZED TOMOGRAPHY; ELECTRON ENERGY LEVELS; LASER APPLICATIONS; PLASMA DENSITY;

INDUCTIVELY COUPLED PLASMA; LASER ABSORPTION SPECTROSCOPY; METASTABLE EXCITED STATE;

PLASMAS;

EID: 0032652091     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763028     Document Type: Article

References (4)

1. A. Okigawa, M. Tadokoro, A. Itoh, N. Nakano, Z. Lj. Petrović, and T. Makabe, "Three dimensional optical emission tomography of an inductively coupled plasma," Jpn. J. Appl. Phys., vol. 36, no. 7B, pp. 4605-4616, 1997.
2. A. Okigawa, Z. Lj. Petrović, M. Tadokoro, T. Makabe, N. Nakano, and A. Itoh, "Diagnostics of a nonequilibrium inductively coupled plasmas in argon," Appl. Phys. Lett., vol. 69, no. 18, pp. 2644-2647, 1996.
3. M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrović, and T. Makabe, "Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar," Phys. Rev. E, vol. 58, no. 6B, pp. 7823-7830, 1998.
4. G. A. Hebner, "Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas," J. Appl. Phys., vol. 80, no. 5, pp. 2624-2636, 1996.