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Volumn 398-399, Issue , 2001, Pages 285-290
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Deposition of carbon-containing cubic boron nitride films by pulsed-DC magnetron sputtering
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Author keywords
Boron carbon nitride films; Cubic boron nitride; Ion assisted deposition; Pulsed DC magnetron sputtering
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CUBIC BORON NITRIDE;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
PHYSICAL VAPOR DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
SUBSTRATE BIAS;
THIN FILMS;
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EID: 0035507127
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01432-8 Document Type: Article |
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Times cited : (15)
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References (30)
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