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Volumn 320, Issue 2, 1998, Pages 220-222
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Preparation of c-BN films by RF sputtering and the relation of BN phase formation to the substrate bias and temperature
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Author keywords
Boron nitride; Fourier transform infrared (FTIR); Magnetron sputtering
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Indexed keywords
CRYSTAL ORIENTATION;
CUBIC BORON NITRIDE;
ELECTRON DIFFRACTION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
PHASE DIAGRAMS;
PHASE TRANSITIONS;
SILICON WAFERS;
SPUTTER DEPOSITION;
SUBSTRATES;
THERMAL EFFECTS;
TRANSMISSION ELECTRON DIFFRACTION (TED);
CERAMIC COATINGS;
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EID: 0032069311
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)01009-2 Document Type: Article |
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Times cited : (18)
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References (12)
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