Preparation of cubic boron nitride films by reactive sputtering from a boron carbide target

Diamond and Related Materials

Volumn 5, Issue 10, 1996, Pages 1130-1135

  Schutze A ^a   Bewilogua, K ^a   Luthje H ^a   Kouptsidis, S ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Adhesion; cBN; Film growth; Sputtering

Indexed keywords

EID: 0001399351     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(96)00530-4     Document Type: Article

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