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Diamond and Related Materials

Volumn 7, Issue 1, 1998, Pages 26-31

Deposition of c-BN films by DC magnetron sputtering

(5) Kouptsidis, S a Luthje H a Bewilogua, K a Schutze A a Zhang, P a

a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST (Germany)

Author keywords

Cubic boron nitride; Deposition; Sputtering

Indexed keywords

DEPOSITION; FILMS; FRICTION; MAGNETRON SPUTTERING; TRIBOLOGY;

DC MAGNETRON SPUTTERING;

CUBIC BORON NITRIDE;

EID: 0031633598 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(97)00150-7 Document Type: Article

Times cited : (26)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.