Modeling of high-speed diamond microswitch

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 237-240

  Schmid, P ^a   Adamschik, M ^a   Ertl, S ^a   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Diamond; Microswitch

Indexed keywords

BENDING (DEFORMATION); CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DIAMONDS; ELECTRIC FIELDS; FINITE ELEMENT METHOD; PARAMETER ESTIMATION; PHASE EQUILIBRIA; SCANNING ELECTRON MICROSCOPY; SWITCHING; TRANSISTORS; VOLTAGE MEASUREMENT;

FEM SIMULATIONS; MATERIAL PROPERTIES; MICROSWITCH; TECHNOLOGICAL PARAMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0003778223     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A. Flöter, H. Güttler, G. Schulz, D. Steinbach, C. Lutz-Eisner, R. Zachai, A. Bergmaier, G. Dollinger, "The nucleation and growth of large area, highly oriented diamond films on silicon", Diamond '97 Conference, Edinburgh, UK, 1997
2. M. Adamschik, S. Ertl, P. Schmid, P. Gluche, A. Fiter, E. Kohn, "Electrostatic Diamond Micro Switch", Digest of technical papers, Transducers 99, June 1999, Sendai, Japan
3. S. Ertl, M. Adamschik, P. Schmid, P. Gluche, A. Flter, E. Kohn, "Surface Micromachined Diamond Microswitch" Presented at the Diamond 99 conference, Prag
4. P. Schmid, M. Adamschik, S. Ertl, E. Kohn, "Dynamic performance of diamond microswitches", EURODINAME 99, Guenzburg, July 99