Electrostatically actuated micromechanical switches

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1246-1249

  Majumder, S ^a   McGruer, N E ^a   Zavracky, P M ^a  

^a Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT HANDLING CAPABILITY; ELECTRICAL CONTACTS; MICROMECHANICAL SWITCH; NICKEL CANTILEVERS; SURFACE MICROMACHINING PROCESS;

ELECTROSTATIC ACTUATORS;

MICROMACHINING;

EID: 0142086199     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580602     Document Type: Article

References (9)

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9. S. Majumder, M.S. thesis, Northeastern University, Boston, MA, 1996.