SCOPUS 정보 검색 플랫폼

Volumn 402-404, Issue , 1998, Pages 831-835

Scanning tunneling microscopy observation of surface reconstruction of Si(100) during chemical vapor deposition from Si2H6

(1) Lin, Deng Sung a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

Chemical vapor deposition; Disilane; Scanning tunneling microscopy; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ATOMIC STRUCTURE; CRYSTAL SYMMETRY; EPITAXIAL GROWTH; SCANNING TUNNELING MICROSCOPY; SILANES; SURFACE STRUCTURE; SURFACE TREATMENT;

SURFACE RECONSTRUCTION;

SEMICONDUCTING SILICON;

EID: 0031645295 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(97)00894-7 Document Type: Article

Times cited : (9)

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