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Journal of Micromechanics and Microengineering

Volumn 11, Issue 5, 2001, Pages 435-442

Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical deposition

(2) Yeo, S H a Choo, J H a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; COPPER; ELECTRODEPOSITION; ELECTRODES; NICKEL; NICKEL PLATING; ROTATION; SOLUTIONS;

HIGH ASPECT RATIO MICROSTRUCTURES; LOCALIZED ELECTROCHEMICAL DEPOSITION; MICROCOLUMNS; MICROPIPES; NICKEL SULFAMATE PLATING SOLUTION; NONSOLUBLE ANODE ELECTRODE;

MICROELECTROMECHANICAL DEVICES;

EID: 0035442549 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/5/301 Document Type: Article

Times cited : (69)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.