3D UV-microforming: principles and applications

Engineering Science and Education Journal

Volumn 8, Issue 1, 1999, Pages 13-19

  Qu, Wenmin ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTROPLATING; ETCHING; FABRICATION; LITHOGRAPHY; MICROSTRUCTURE; NICKEL; PHOTORESISTS; SENSORS; STIFFNESS; TITANIUM; ULTRAVIOLET RADIATION;

OSCILLATING STRUCTURES; SACRIFICIAL LAYER TECHNIQUE; SURFACE MICROFABRICATION; THREE DIMENSIONAL ULTRAVIOLET MICROFORMING; TRIAXIAL ACCELEROMETERS; WET ETCHING;

MICROMACHINING;

EID: 0033075918     PISSN: 09637346     EISSN: None     Source Type: Journal    
DOI: 10.1049/esej:19990103     Document Type: Article

References (7)

1. MENZ, W.: 'LIGA and related technologies for industrial application' Sens. Actuators A, 1996, 54, pp.785-789
2. ENGELMANN, G., EHRMANN, O., SIMON, J., and REICHL, H.: 'Fabrication of high depth-to-width aspect ratio microstructures'. Proc. Micro Electro Mechanical Systems '92, Travemuende, Germany, 4-7 February 1992, pp.93-98
3. MENZ, W., and MOHR, J.: 'Mikrosystemtechnik für Ingenieure' (VCH Verlagsgesellschaft mbH, Weinheim, Germany, 1997)
4. LAWES, R. A.: '3D microforming for Europractice manufacturing cluster 3', MST-News, May/June 1997, pp.45-46
5. LOECHEL, B.: 'UV supported 3D microforming - UV lithography and electrode position', MST-News, October/November 1996, pp.24-26
6. NOETZEL, T., TONNESEN, T., BENECKE, W., BINDER, J., and MADER, G.: 'Quasianalog accelerometer using microswitch array', Sens. Actuators A, 1996, 54, pp.574-578
7. QU, W., WENZEL, C., and DRESCHER, K.: '3D UV-microforming: a low cost new technology for surface micromachining'. IEE Colloquium on Recent advances in micromachining techniques, London, 20th November 1997, pp.4/1-4/3, IEE Colloquium Digest 97/018