Two-photon-absorbed photopolymerization for three-dimensional microfabrication

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 169-174

  Maruo, Shoji ^a   Kawata, Satoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ACRYLIC MONOMERS; LASER BEAM EFFECTS; MICROELECTRONIC PROCESSING; OLIGOMERS; PHOTOCHEMICAL REACTIONS; PHOTONS; POLYMERIZATION; POLYMERS;

THREE DIMENSIONAL MICROFABRICATION; TWO PHOTON ABSORBED PHOTOPOLYMERIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0030645040     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)