Micromachined YBaCuO capacitor structures as uncooled pyroelectric infrared detectors

Journal of Applied Physics

Volumn 84, Issue 3, 1998, Pages 1680-1687

  Butler, Donald P ^a   Çelik Butler, Zeynep ^a   Jahanzeb, Agha ^a   Gray, John E ^a   Travers, Christine M ^a  

^a Southern Methodist University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC VARIABLES MEASUREMENT; FABRICATION; MAGNETRON SPUTTERING; MICROMACHINING; PYROELECTRICITY; RAMAN SPECTROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE STRUCTURES; THERMAL EFFECTS; X RAY DIFFRACTION; YTTRIUM COMPOUNDS;

ELECTRON MICROPROBE ANALYSIS; OPTICAL HEATING METHOD; SUBSTRATE HEATING METHOD; UNCOOLED PYROELECTRIC INFRARED DETECTORS;

INFRARED DETECTORS;

EID: 0032134628     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368257     Document Type: Article

References (19)

1. B. M. Kulwicki, A. Amin, H. R. Beratan, and C. M. Hanson, in Proceedings of the 8th International Symposium on the Applications of Ferroelectrics, Greenville South Carolina, August 1992, edited by M. Liu, A. Safari, A. Kingon, and G. Haertling (IEEE, Piscataway, NJ, 1992), p. 1.
2. D. L. Polla, C. Ye, and T. Tamagawa, Appl. Phys. Lett. 59, 3539 (1991).
3. I. Poberaj and D. Michailovic, Ferroelectrics 128, 197 (1992).
4. A. Jahanzeb, C. M. Travers, D. P. Butler, Z. Çelik-Butler, and J. E. Gray, Appl. Phys. Lett. 70, 3495 (1997).
5. G. Yu and A. Heeger, Int. J. Mod. Phys. B 7, 3751 (1993).
6. D. Mihailovic, I. Poberaj, and A. Mertelj, Phys. Rev. B 48, 16 634 (1993).
7. D. Mihailovic and C. M. Foster, Solid State Commun. 74, 753 (1990).
8. P. C. Shan, A. Jahanzeb, D. P. Butler, Z. Çelik-Butler, W. Kula, and R. Sobolewski, J. Appl. Phys. 81, 6866 (1997).
9. R. W. Whatmore, Rep. Prog. Phys. 49, 1335 (1986).
10. A. Jahanzeb, C. M. Travers, Z. Çelik-Butler, D. P. Butler, and S. G. Tan, IEEE Trans. Electron Devices ED-44, 1795 (1997).
11. D. P. Butler, A. Jahanzeb, P.-C. Shan, C. Travers, and Z. Çelik-Butler, Proc. SPIE 2816, 46 (1996).
12. J. E. Gray, Zeynep Çelik-Butler, and D. P. Butler, Ferroelectrics (to be published).
13. J. P. Rice, E. N. Grossman, L. J. Borcheerdt, and D. A. Rudman, Proc. SPIE 2159, 98 (1994).
14. E. H. Putley, in Semiconductors and Semimetals, edited by R. K. Willardson and A. C. Beer (Academic, New York, 1970), Vol. 5, p. 259.
15. A. van der Ziel and K. M. van Vliet, Ferroelectrics 28, 365 (1980).
16. S. T. Liu and D. Long, Proc. IEEE 66, 14 (1978).
17. A. S. Bhalla, C. S. Fang, Y. Xi, and L. E. Cross, Appl. Phys. Lett. 43, 932 (1983).
18. A. F. Devonshire, Adv. Phys. 3, 85 (1954).
19. C. M. Rey, H. Mathias, L. R. Testardi, and S. Skirius, Phys. Rev. B 45, 10 639 (1992).