High performance infrared detector arrays using thin film microstructures

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1994, Pages 653-656

  Cole, B ^a   Horning, R ^a   Johnson, B ^a   Nguyen, K ^a   Kruse, P W ^a   Foote, M C ^a  

^a HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BOLOMETERS; ETCHING; INFRARED IMAGING; LEAD COMPOUNDS; MICROSTRUCTURE; OXIDE SUPERCONDUCTORS; SEMICONDUCTING SILICON; THERMODYNAMIC PROPERTIES; THIN FILMS; VANADIUM COMPOUNDS;

BOLOMETER DETECTOR; INFRARED DETECTOR ARRAYS; TEMPERATURE RISE; TEMPERATURE SENSITIVE DETECTOR MATERIALS; THERMAL ISOLATION; THIN FILM MICROSTRUCTURES;

INFRARED DETECTORS;

EID: 0028686880     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)