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Volumn 1999-W, Issue , 1999, Pages 93-99

THERMAL DESIGN AND BATCH FABRICATION OF CANTILEVER PROBES FOR SCANNING THERMAL MICROSCOPY

Author keywords

[No Author keywords available]

Indexed keywords

BINARY ALLOYS; CHROMIUM ALLOYS; ENERGY HARVESTING; FABRICATION; HEAT TRANSFER; NANOCANTILEVERS; OPTOELECTRONIC DEVICES; SILICA; THERMOCOUPLES;

EID: 0003055770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0251     Document Type: Conference Paper
Times cited : (6)

References (13)
  • 1
    • 0003434380 scopus 로고
    • John Wiley & Sons, New York
    • Bejan, A., 1993, Heat Transfer, John Wiley & Sons, New York.
    • (1993) Heat Transfer
    • Bejan, A.1
  • 2
    • 0029310091 scopus 로고
    • Micromachined Submicrometer Photodiode for Scaiming Probe Microscopy
    • Davis, R.C., Williams, C.C., and Neuzil, P., 1995, “Micromachined Submicrometer Photodiode for Scaiming Probe Microscopy,” Appl. Phys. Letts., Vol. 66, pp.2309-2311.
    • (1995) Appl. Phys. Letts , vol.66 , pp. 2309-2311
    • Davis, R.C.1    Williams, C.C.2    Neuzil, P.3
  • 3
    • 0019686686 scopus 로고
    • A Method of Detecting Hot Spots on Semiconductors Using Liquid Crystals
    • Hiatt, J., 1981, “A Method of Detecting Hot Spots on Semiconductors Using Liquid Crystals,” in IEEE Proc. Int. Reli. Physics Symp., pp. 130-133.
    • (1981) IEEE Proc. Int. Reli. Physics Symp , pp. 130-133
    • Hiatt, J.1
  • 4
    • 0022561939 scopus 로고
    • Analysis of Product Hot Electron Problems by Gated Emission Microscopy
    • Khurana, N. and Chiang, C.-L., 1986, “Analysis of Product Hot Electron Problems by Gated Emission Microscopy,” in IEEE Proc. Int. Reli. Physics Symp., pp. 189-194.
    • (1986) IEEE Proc. Int. Reli. Physics Symp , pp. 189-194
    • Khurana, N.1    Chiang, C.-L.2
  • 5
    • 0031102074 scopus 로고    scopus 로고
    • Sensor Nanofabrication, Performance, and Conduction Mechanisms in Scanning Thermal Microscopy
    • Luo, K., Shi, Z., Varesi, J., and Majumdar, A., 1997 “Sensor Nanofabrication, Performance, and Conduction Mechanisms in Scanning Thermal Microscopy,” J. Vac.Sci Technol. B., Vol. 15, pp.349-360.
    • (1997) J. Vac.Sci Technol. B , vol.15 , pp. 349-360
    • Luo, K.1    Shi, Z.2    Varesi, J.3    Majumdar, A.4
  • 6
    • 20544448056 scopus 로고
    • Thermal Imaging Using the Atomic Force Microscope
    • Vo
    • Majumdar, A., Carrejo, J. P., and Lai, J., 1993, “Thermal Imaging Using the Atomic Force Microscope,” Appl. Phys. Lett.,Vo\. 62, pp.2501-2503.
    • (1993) Appl. Phys. Lett , vol.62 , pp. 2501-2503
    • Majumdar, A.1    Carrejo, J. P.2    Lai, J.3
  • 7
    • 0007994272 scopus 로고
    • Scanning Probe Microscopy of Thermal Conductivity and Substrate Properties
    • Noimeiunacher, M., and Wickramasinghe, H. K., 1992, “Scanning Probe Microscopy of Thermal Conductivity and Substrate Properties,” Appl. Phys. Lett., Vol. 61, pp. 168-170.
    • (1992) Appl. Phys. Lett , vol.61 , pp. 168-170
    • Noimeiunacher, M.1    Wickramasinghe, H. K.2
  • 11
    • 0003432018 scopus 로고
    • Plenum Press, New York; Thermal Conductivity of Metallic Solids; 2, Thermal Conductivity of nonmetallic Solids
    • Touloukian, Y.S., and Ho, C. Y., 1972, Thermophysical Properties of Matter, Plenum Press, New York; Vol. 1, Thermal Conductivity of Metallic Solids; Vol. 2, Thermal Conductivity of nonmetallic Solids.
    • (1972) Thermophysical Properties of Matter , vol.1
    • Touloukian, Y.S.1    Ho, C. Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.