Short-time-scale thermal mapping of microdevices using a scanning thermoreflectance technique

Journal of Heat Transfer

Volumn 120, Issue 2, 1998, Pages 306-313

  Ju, Y S ^a   Goodson, K E ^a  

^a Stanford University   (United States)

Author keywords

Conduction; Measurement techniques; Transient and Unsteady Heat Transfer

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTROMAGNETIC WAVE REFLECTION; LASER APPLICATIONS; LASER OPTICS; PASSIVATION; SILICON ON INSULATOR TECHNOLOGY; TEMPERATURE DISTRIBUTION; TRANSISTORS;

ELECTRICAL OVERSTRESS (EOS) PHENOMENA; MICRODEVICES; SCANNING LASER THERMOMETRY;

TEMPERATURE MEASUREMENT;

EID: 0032071599     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2824246     Document Type: Article

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