ANALYSIS OF PRODUCT HOT ELECTRON PROBLEMS BY GATED EMISSION MICROSCOPY.

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1986, Pages 189-194

  Khurana, N ^a   Chiang, C L ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS - EMISSION; IMAGING TECHNIQUES; MICROSCOPIC EXAMINATION;

EMISSION MICROSCOPY; HOT ELECTRONS; NIGHT VISION TECHNOLOGY;

INTEGRATED CIRCUITS, VLSI;

EID: 0022561939     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/irps.1986.362132     Document Type: Conference Paper

References (15)