SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 688-692

The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films

(4) Popov, C a Plass, M F a Zambov, L M a Kulisch, W a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

Carbon nitride; D.c. bias; Inductively coupled plasma chemical vapor deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DENSIFICATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

TRANSPORT REACTIONS;

SUBSTRATES;

CARBON NITRIDE;

EID: 0035386392 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01158-6 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.