Quantum chemical study on decomposition and polymer deposition in perfluorocarbon plasmas: Molecular orbital calculations of excited states of perfluorocarbons

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 2 A, 2001, Pages 847-854

  Nakamura, T ^a   Motomura, H ^a   Tachibana, K ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Ab initio molecular orbital calculation; Aromatic perfluorocarbon; Excited state; Fluorocarbon plasma; One triple bonded perfluorocarbon; Perfluorocarbon; Polymer deposition; Quantum chemistry; Two double bonded perfluorocarbon

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; FLUORINE CONTAINING POLYMERS; FREE RADICALS; MOLECULAR ORIENTATION; NUMERICAL ANALYSIS; PERMITTIVITY; PLASMA POLYMERIZATION; QUANTUM THEORY;

MOLECULAR ORBITAL CALCULATIONS; PERFLUOROCARBONS; POLYMER DEPOSITION; QUANTUM CHEMICAL STUDY;

FLUOROCARBONS;

EID: 0035246297     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.847     Document Type: Article

References (20)