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Volumn 647, Issue , 2001, Pages
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Properties of gallium disorder and gold implants in GaN
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHIZATION;
ANNEALING;
ATOMS;
CRYSTAL DEFECTS;
DIFFUSION IN SOLIDS;
EPITAXIAL GROWTH;
GOLD;
ION IMPLANTATION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SAPPHIRE;
SEMICONDUCTING FILMS;
SINGLE CRYSTALS;
CHANNELING GEOMETRY;
IMPLANTATION DAMAGE;
ION FLUENCE;
THERMAL ANNEALING;
GALLIUM NITRIDE;
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EID: 0035160684
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (18)
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