Thermal annealing characteristics of Si and Mg-implanted GaN thin films

Applied Physics Letters

Volumn 68, Issue 19, 1996, Pages 2702-2704

  Chan, J S ^a   Cheung, N W ^a   Schloss, L ^b   Jones, E ^b   Wong, W S ^b   Newman, N ^b   Liu, X ^b   Weber, E R ^b   Gassman, A ^c   Rubin, M D ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Lawrence Berkeley National Laboratory   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001048820     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116314     Document Type: Article

References (20)

1. H. Morkoç, S. Strite, G. B. Gao, and M. E. Lin, J. Appl. Phys. AIP 76, 1363 (1994).
2. S. Nakamura, T. Mukai, and M. Senoh, Jpn. J. Appl. Phys. INS 31, 2883 (1992).
3. M. D. Rubin, N. Newman, J. S. Chan, T. C. Fu, and J. T. Ross, Appl. Phys. Lett. AIP 64, 64 (1994).
4. C. Wang and R. F. Davis, Appl. Phys. Lett. AIP 63, 990 (1993).
5. M. A. Khan, M. S. Shur, J. N. Kuznia, Q. Chen, J. Burm, and W. Schaff, Appl. Phys. Lett. AIP 66, 1083 (1995).
6. S. Nakamura, M. Senoh, and T. Mukai, Appl. Phys. Lett. AIP 62, 2390 (1993).
7. B. Goldenberg, J. D. Zook, and R. J. Ulmer, Appl. Phys. Lett. AIP 62, 381 (1993).
8. S. C. Binari, H. B. Dietrich, G. Kelner, and L. B. Rowland, J. Appl. Phys. AIP 78, 3008 (1995).
9. S. J. Pearton, C. B. Vartuli, J. C. Zolper, C. Yuan, and R. A. Stall, Appl. Phys. Lett. AIP 67, 1435 (1995).
10. N. Newman, T. C. Fu, X. Liu, Z. Liliental-Weber, M. D. Rubin, J. S. Chan, E. Jones, J. T. Ross, I. Tidswell, K. M. Yu, N. W. Cheung, and E. R. Weber, Mater. Res. Soc. Symp. Proc. INS 339, 483 (1994).
11. R. J. Molnar, T. Lei, and T. D. Moustakas, Appl. Phys. Lett. AIP 62, 72 (1993).
12. C. Stolte, in Semiconductors and Semimetals (Academic, Orlando, FL, 1984), Vol. 20.
13. N. Newman, J. T. Ross, and M. D. Rubin, Appl. Phys. Lett. AIP 62, 1242 (1993).
14. A. G. Milnes, Deep Impurities in Semiconductors (Wiley, New York, 1973).
15. W. M. Chen, P. Dreszer, A. Prasad, and A. Karpieski, J. Appl. Phys. AIP 76, 600 (1994).
16. J. S. Chan, Ph.D. thesis, College of Engineering, UC-Berkeley, 1995.
17. M. E. Lin, B. N. Sverdlov, and H. Morkoç, Appl. Phys. Lett. AIP 63, 3625 (1993).
18. R. G. Wilson, S. J. Pearton, and C. R. Abernathy, Appl. Phys. Lett. AIP 66, 2238 (1995).
19. D. C. Look, Electrical Characterization of GaAs Materials and Devices (Wiley, New York, 1989).
20. J. F. Ziegler and J. P. Biersack, TRIM-90 (Pergamon, New York, 1990).