New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 118-124

  Geiger, Wolfram ^a,b   Folkmer, Bernd ^a   Sobe, Udo ^a   Sandmaier, Hermann ^a   Lang, Walter ^a  

^a Institute of Micromachining and Information Technology   (Germany)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

Levitation; Rate gyroscopes; System simulation

Indexed keywords

ACTUATORS; BANDWIDTH; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; VIBRATIONS (MECHANICAL);

LEVITATION; VIBRATING RATE GYROSCOPES;

GYROSCOPES;

EID: 0032050912     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01758-5     Document Type: Article

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