SCOPUS 정보 검색 플랫폼

Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 417-428

Porous silicon in microsystems: Thermal isolation applications

(4) Perichon S a Lysenko, V a Remaki, B a Barbier, D a

a UNIVERSITÉ DE LYON (France)

Author keywords

Microsystems; Porous silicon; Thermal conductivity

Indexed keywords

BIOSENSORS; CMOS INTEGRATED CIRCUITS; CRYSTAL STRUCTURE; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; POROSITY; RAMAN SCATTERING; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS;

BIOMEDICAL MICROSENSOR; MICRO-RAMAN SCATTERING; MICROSYSTEM; NANO-SCALE CRYSTALLINE SILICON; THERMAL ISOLATION;

POROUS SILICON;

EID: 0034834108 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.80-81.417 Document Type: Conference Paper

Times cited : (5)

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