Theoretical and experimental study of heat conduction in as-prepared and oxidized meso-porous silicon

Microelectronics Journal

Volumn 30, Issue 11, 1999, Pages 1141-1147

  Lysenko, V ^a   Boarino, L ^b   Bertola, M ^b   Remaki, B ^a   Dittmar, A ^a   Amato, G ^b   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC VARIABLES MEASUREMENT; HEAT CONDUCTION; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; PHOTOACOUSTIC SPECTROSCOPY; TEMPERATURE; THERMAL CONDUCTIVITY; THERMODYNAMICS; THERMOOXIDATION;

OXIDIZED MESOPOROUS SILICON; PHOTOACOUSTIC MEASUREMENTS;

POROUS SILICON;

EID: 0033359678     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00077-4     Document Type: Article

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