Thick oxidised porous silicon layers for the design of a biomedical thermal conductivity microsensor

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 100-103

  Roussel, Ph ^a   Lysenko, V ^a   Remaki, B ^a   Delhomme, G ^a   Dittmar, A ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; ENERGY DISPERSIVE SPECTROSCOPY; MICROSENSORS; OXIDATION; SEEBECK EFFECT; SILICA; STABILITY; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL INSULATING MATERIALS; THERMOPILES;

DIFFERENTIAL THERMOELECTRIC MEASUREMENTS; MECHANICAL STABILITY; THIN FILM BASED MICROSENSOR; TISSUE BLOOD MICRO FLOW MEASUREMENTS;

POROUS SILICON;

EID: 0032677979     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00330-6     Document Type: Article

References (8)

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5. Lysenko V., Roussel Ph., Delhomme G., Rossokhaty V., Strikha V., Dittmar A., Barbier D., Jaffrezic-Renault N., Martelet C. Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors. Sensors and Actuators A. 67:1998;205-210.
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8. A. Halimaoui, in: J.C. Vial, J. Derrien (Eds.), Porous Silicon: Science and Technology, Springer-Verlag, Berlin and Les Editions de Physique, Les Ulis, 1995, p. 34.