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Volumn 69, Issue , 2000, Pages 104-108

Biochemical sensors with structured and porous silicon capacitors

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CAPACITORS; ELECTROLYTES; ETCHING; POROUS SILICON; SENSITIVITY ANALYSIS; SUBSTRATES;

BIOCHEMICAL SENSORS; POROUS ELECTROLYTE-INSULATOR-SEMICONDUCTOR (EIS) SENSORS;

PH SENSORS;

EID: 0343457953 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(99)00275-5 Document Type: Article

Times cited : (33)

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