The application of porous silicon interference filters in optical sensors

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 250-253

  Hilbrich, S ^a   Arens Fischer, R ^a   Kupper L ^a   Theiss W ^a   Berger, M G ^b   Kruger M ^b   Thonissen M ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Interference filters; Optical sensors; Porous silicon

Indexed keywords

ABSORPTION SPECTROSCOPY; CURRENT DENSITY; ETCHING; OPTICAL SENSORS; POROUS SILICON; SPECTROMETERS;

INTERFERENCE FILTERS;

OPTICAL FILTERS;

EID: 0031124523     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09364-9     Document Type: Article

References (7)

1. W. Theiß et al., Mater. Res. Soc. Symp. Proc., 358 (1995) 435.
2. W. Theiß, The dielectric function of porous silicon - how to obtain it and how to use it, Thin Solid Films, 276 (1996) 7-12.
3. S. Hilbrich, W. Theiß, R. Arens-Fischer, O. Glück and M.G. Berger, The influence of the doping level on the optical properties of porous silicon, Thin Solid Films, 276 (1996) 231-234.
4. M.G. Berger, Doctoral Thesis, RWTH, Aachen, 1996.
5. W. Theiß et al., Phys. Status Solidi (b), 190 (1995) 15.
6. W.H. Southwell, Appl. Opt., 28 (23) (1989) 5091.
7. H. Martens and T. Naes, Multivariate Calibration, Wiley, New York, 1989.