Porous silicon layers used for gas sensor applications

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 317-320

  Foucaran, A ^a   Pascal Delannoy, F ^a   Giani, A ^a   Sackda, A ^a   Combette, P ^a   Boyer, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Electrical measurements and properties; Gas sensors; Porous silicon

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; GASES; POROUS SILICON; SEMICONDUCTOR JUNCTIONS;

GOLD POROUS SILICON LAYERS; HUMIDITY LEVELS;

THIN FILMS;

EID: 0031118815     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09437-0     Document Type: Article

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