Additive fabrication and the mechanisms of nucleation and growth in chemical vapor deposition processes

Accounts of Chemical Research

Volumn 33, Issue 12, 2000, Pages 869-877

  Crane, E L ^a   Girolami, G S ^a   Nuzzo, R G ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPPER; METAL; PLATINUM;

ADSORPTION; ARTICLE; FILM; GAS; MOLECULAR DYNAMICS; MOLECULAR INTERACTION; REACTION ANALYSIS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; SURFACE PROPERTY; SYNTHESIS; TEMPERATURE; VAPOR;

ALUMINUM; GASES; MICROSCOPY, ELECTRON, SCANNING; PLATINUM; SPECTRUM ANALYSIS; TEMPERATURE;

EID: 0034522173     PISSN: 00014842     EISSN: None     Source Type: Journal    
DOI: 10.1021/ar960102n     Document Type: Article

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