메뉴 건너뛰기




Volumn 118, Issue 25, 1996, Pages 5977-5987

Mechanistic studies of palladium thin film growth from palladium(II) β-diketonates. 1. Spectroscopic studies of the reactions of bis(hexafluoroacetylacetonato)palladium(II) on copper surfaces

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; PALLADIUM COMPLEX;

EID: 0030056176     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja944130h     Document Type: Article
Times cited : (94)

References (54)
  • 2
    • 0003494876 scopus 로고
    • Vossen, J. L., Kern, W., Eds.: Academic: Boston, Chapter III-1
    • Jensen, K. F.; Kern, W. In Thin Film Processes; Vossen, J. L., Kern, W., Eds.: Academic: Boston, 1991; Vol. II, Chapter III-1.
    • (1991) Thin Film Processes , vol.2
    • Jensen, K.F.1    Kern, W.2
  • 4
    • 8944245023 scopus 로고
    • Hess, D. W., Jensen, K. F., Eds.; Advances in Chemistry 221; American Chemical Society: Washington, DC, Chapter 5
    • Jensen, K. F. In Microelectronic Processing: Chemical Engineering Aspects; Hess, D. W., Jensen, K. F., Eds.; Advances in Chemistry 221; American Chemical Society: Washington, DC, 1989; Chapter 5.
    • (1989) Microelectronic Processing: Chemical Engineering Aspects
    • Jensen, K.F.1
  • 6
    • 0141689703 scopus 로고
    • Rana, V. V. S., Joshi, R. V., Ohdomari, I., Eds.; Materials Research Society: Pittsburgh
    • Joshi, R. V.; Basavaiah, S.; Hsu, L.; Jaso, M. In Proc. Adv. Metal. ULSI Appl.; Rana, V. V. S., Joshi, R. V., Ohdomari, I., Eds.; Materials Research Society: Pittsburgh, 1992; pp 35-48.
    • (1992) Proc. Adv. Metal. ULSI Appl. , pp. 35-48
    • Joshi, R.V.1    Basavaiah, S.2    Hsu, L.3    Jaso, M.4
  • 15
    • 0342698116 scopus 로고
    • Hummel, R. E., Huntington, H. B., Eds.; American Institute of Mining, Metallurgical, and Petroleum Engineers: New York
    • Ho, P. S.; d'Heurle, F. M.; Gangulee, A. In Electro- and Thermo-Transport in Metals and Alloys; Hummel, R. E., Huntington, H. B., Eds.; American Institute of Mining, Metallurgical, and Petroleum Engineers: New York, 1977; pp 124-126.
    • (1977) Electro- and Thermo-Transport in Metals and Alloys , pp. 124-126
    • Ho, P.S.1    D'Heurle, F.M.2    Gangulee, A.3
  • 30
    • 8944227061 scopus 로고    scopus 로고
    • note
    • 3] and 106 (Pd).
  • 32
    • 8944230676 scopus 로고    scopus 로고
    • note
    • 27
  • 33
    • 8944230206 scopus 로고    scopus 로고
    • note
    • 5/2 peak remains essentially unchanged, the peak at 533.3 eV completely disappears.
  • 34
    • 8944233892 scopus 로고    scopus 로고
    • Manuscript in preparation
    • 2 is due to the hfac ligands orientated parallel to the surface. Lin, W.; Wiegand, B. C.; Girolami, G. S.; Nuzzo, R. G. Manuscript in preparation.
    • Lin, W.1    Wiegand, B.C.2    Girolami, G.S.3    Nuzzo, R.G.4
  • 35
    • 8944232119 scopus 로고    scopus 로고
    • Unpublished observations
    • Parmeter, J. E. Unpublished observations.
    • Parmeter, J.E.1
  • 40
    • 0342778780 scopus 로고
    • Redhead, P. A. Vacuum 1962, 12, 203-211.
    • (1962) Vacuum , vol.12 , pp. 203-211
    • Redhead, P.A.1
  • 41
    • 0002799018 scopus 로고
    • The Auger electron spectrum of the pretreated surface did not show any signal for fluorine, probably because of electron-induced desorption of fluorine during the AES experiment. See, for example: Westphal, D.; Goldman, A. Surf. Sci. 1983, 131, 92-113.
    • (1983) Surf. Sci. , vol.131 , pp. 92-113
    • Westphal, D.1    Goldman, A.2
  • 43
    • 0041068181 scopus 로고
    • The satellite peak with the highest binding energy is due to a simultaneous 3d to 4p transition occurring during the photoionization process; the satellite peak with the smaller energy shift can be explained by a simultaneous 3d to ligand transition. Cotton, F. A.; Harris, C. B.; Wise, J. J. Inorg. Chem. 1967, 6, 909-915.
    • (1967) Inorg. Chem. , vol.6 , pp. 909-915
    • Cotton, F.A.1    Harris, C.B.2    Wise, J.J.3
  • 46
    • 8944226592 scopus 로고    scopus 로고
    • note
    • 2 desorbs from carbonaceous copper surfaces.
  • 48
    • 0000241957 scopus 로고
    • There is little doubt that surface structures present on the polycrystal must be more diverse and complex than those found on a high-quality Cu-(111) single crystal. It is for this reason that the simple pattern of coincident peaks seen in Figure 8 is so perplexing. Such behavior could be rationalized if other features, such as diffusion to or trapping at strong bonding sites, dominated the adsorbate decomposition kinetics. This type of dynamical effect must be important at some level in the decomposition processes but to what extent it is expressed in the observed kinetics is unclear. We can offer little more here than to point out that "intuitive notions" of rate-structure sensitivities in heterogeneous reaction kinetics can be very misleading. An excellent discussion of the influence of surface heterogeneity in adsorption/desorption kinetics can be found in: Serri, J. A.; Tully, J. C.; Cardillo, M. J. J. Chem. Phys. 1983, 79, 1530-1536.
    • (1983) J. Chem. Phys. , vol.79 , pp. 1530-1536
    • Serri, J.A.1    Tully, J.C.2    Cardillo, M.J.3
  • 49
    • 0001245625 scopus 로고
    • For a recent review of the atomic-scale mechanisms that operate in metal-on-metal film structures, see: Chang, S.-L.; Thiel, P. A. Crit. Rev. Surf. Chem. 1994, 3, 239-296.
    • (1994) Crit. Rev. Surf. Chem. , vol.3 , pp. 239-296
    • Chang, S.-L.1    Thiel, P.A.2
  • 51
    • 8944263320 scopus 로고    scopus 로고
    • note
    • II species on the surface as judged by XPS studies.
  • 52
    • 4243854297 scopus 로고
    • Weast, R. C., Astle, M. J., Beyer, W. H., Eds.; CRC Press: Boca Raton, FL
    • Vanýsek, P. In Handbook of Chemistry and Physics, 68th ed.; Weast, R. C., Astle, M. J., Beyer, W. H., Eds.; CRC Press: Boca Raton, FL, 1988; pp D152-D154.
    • (1988) Handbook of Chemistry and Physics, 68th Ed.
    • Vanýsek, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.