Study on micromachined bimetallic actuation

Sensors and Actuators, A: Physical

Volumn 78, Issue 2, 1999, Pages 212-219

  Zou, Quanbo ^a   Sridhar, Uppili ^a   Lin, Rongming ^b  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; FINITE ELEMENT METHOD; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION;

MICROMACHINED BIMETALLIC ACTUATION;

ACTUATORS;

EID: 0033358188     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00236-8     Document Type: Article

References (9)

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