Thermally actuated bimorph microactuators

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 18, Issue 6, 1997, Pages 525-531

  Lin, Y Sh ^a   Pan, Ch Sh ^a   Hsu, W ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BEAMS AND GIRDERS; FABRICATION; PERFORMANCE; TESTING; THERMAL EXPANSION; VIBRATORS;

MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031387259     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)