A micro membrane vibrator with thermally driven bimorph cantilever beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3241, Issue , 1997, Pages 195-205

  Tsao, Chun Chieh ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Bimorph; Membrane vibrator; Micromachining

Indexed keywords

ALUMINA; CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; INTEGRATED CONTROL; MACHINING; MICROMACHINING; NANOCANTILEVERS; POLYSILICON; THERMAL EXPANSION; THERMAL SPRAYING; VIBRATORS;

AXIS DISPLACEMENTS; BIMORPH; BIMORPH CANTILEVERS; EXPANSION COEFFICIENTS; FINITE ELEMENT PROGRAMS; INPUT POWERS; LAYER STRUCTURES; TEMPERATURE CHANGES; TESTING RESULTS; WORKING FREQUENCIES;

MEMBRANES;

EID: 0242696694     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293498     Document Type: Conference Paper

References (5)

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